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主机设备清单<br />名称 型号 厂家 年代<br />CVD ILD Dep Amat 5000 Applied Materials 1992--1995<br />CVD W Dep Amat 5000 Applied Materials 1992<br />LRC Etcher AE 480 LAM Research Corp. 1985<br />LRC Poly Etcher 490 LAM Research Corp. 1986<br />LRC Poly Etcher 490B LAM Research Corp. 1987--1993<br />LRC Nit/Diel Etcher 490B LAM Research Corp. 1990--1991<br />Microwave Asher AURA 1000 Gasonics International 1989--1995<br />AMAT Metal Etcher AMAT 8330 Applied Materials 1991--1994<br />AMAT Oxide Etcher AMAT 8310 Applied Materials 1988--1996<br />Prober EG2001X,EG2001CX,EG2010 ELECTROGLAS 1984--1996<br />Rinser Dryer 1600(double ) Verteq (Rhetech, Inc.) 1990--1993<br />SSI Track 500 BAY 900 Semiconductor Systems, Inc. 1990<br />SSI Track 150 BAY 910 Semiconductor Systems, Inc. 1990<br />SSI Track 150 Semiconductor Systems, Inc. 1990--1993<br />SSI Track 500 Semiconductor Systems, Inc. 1989--1998<br />Biorad Q2 Req. Q5 Quaestor 1994<br /><br />设备辅机清单<br />Amat 5000 所属附机4套<br />辅机：1,Heat Exchanger 2,Transformer 3,Miscellaneous 4,Gas Cabinet/Box <br />5,Etch Interface Unit 6,RF Generator 7,Generator <br />8,AC Remote Panel/RF Gen 9, Miscellaneous/Monitor 10,Gas Box <br />11, Monitor Ar<br />490B 所属附机10套<br />辅机：1, Chiller 2, Monitor 3, Monitor/Remote<br /><br />AMAT 8330 所属附机4套<br />辅机：1, RF Generator 2, Miscellaneous 3, Miscl/Monitor 4, Power Supply 5, Arm <br />6, Electrical Box 7, Cables<br />AMAT 8310 所属附机10套<br />辅机：1, Miscellaneous 2, Chiller 3, VME 4, RF Generator 5, Heat Exchanger <br />6, Load Chamber/Heat Exchanger<br /> 7, Miscl/Cables 8, Arm 9, Power Supply 10, Generator 11, Cables<br /><br />500 BAY 900 所属附机17套<br />辅机：1, Chiller 2, Roll Around/Power Supply 3, Chemical Cabinet/Power Conditioner <br />4, Miscl/Power Conditioner 5, Chemical Cabinet/RF Generator 6, Pwr. Conditioner 7, FTC Cabinet/Power Conditioner 8, Chemical Cabinet<br /><br />Q5 所属附机2套<br />辅机：1,Power Supply 2, Miscellaneous 3, Stage 4, Stage/Optics<br /><br />除此外我公司还有大量Edwards单泵和组合泵<br />Edwards Pump：<br />Qdp40, Qdp40/Qmb250, Qdp40/Qmb500<br />Iqdp80, Iqdp80/qmb500 ， Iqdp80/Iqmb250， Iqdp80/Iqmb500<br /><br /><br /> |
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