主机设备清单
名称 型号 厂家 年代
CVD ILD Dep Amat 5000 Applied Materials 1992--1995
CVD W Dep Amat 5000 Applied Materials 1992
LRC Etcher AE 480 LAM Research Corp. 1985
LRC Poly Etcher 490 LAM Research Corp. 1986
LRC Poly Etcher 490B LAM Research Corp. 1987--1993
LRC Nit/Diel Etcher 490B LAM Research Corp. 1990--1991
Microwave Asher AURA 1000 Gasonics International 1989--1995
AMAT Metal Etcher AMAT 8330 Applied Materials 1991--1994
AMAT Oxide Etcher AMAT 8310 Applied Materials 1988--1996
Prober EG2001X,EG2001CX,EG2010 ELECTROGLAS 1984--1996
Rinser Dryer 1600(double ) Verteq (Rhetech, Inc.) 1990--1993
SSI Track 500 BAY 900 Semiconductor Systems, Inc. 1990
SSI Track 150 BAY 910 Semiconductor Systems, Inc. 1990
SSI Track 150 Semiconductor Systems, Inc. 1990--1993
SSI Track 500 Semiconductor Systems, Inc. 1989--1998
Biorad Q2 Req. Q5 Quaestor 1994
设备辅机清单
Amat 5000 所属附机4套
辅机：1,Heat Exchanger 2,Transformer 3,Miscellaneous 4,Gas Cabinet/Box
5,Etch Interface Unit 6,RF Generator 7,Generator
8,AC Remote Panel/RF Gen 9, Miscellaneous/Monitor 10,Gas Box
11, Monitor Ar
490B 所属附机10套
辅机：1, Chiller 2, Monitor 3, Monitor/Remote
AMAT 8330 所属附机4套
辅机：1, RF Generator 2, Miscellaneous 3, Miscl/Monitor 4, Power Supply 5, Arm
6, Electrical Box 7, Cables
AMAT 8310 所属附机10套
辅机：1, Miscellaneous 2, Chiller 3, VME 4, RF Generator 5, Heat Exchanger
6, Load Chamber/Heat Exchanger
7, Miscl/Cables 8, Arm 9, Power Supply 10, Generator 11, Cables
500 BAY 900 所属附机17套
辅机：1, Chiller 2, Roll Around/Power Supply 3, Chemical Cabinet/Power Conditioner
4, Miscl/Power Conditioner 5, Chemical Cabinet/RF Generator 6, Pwr. Conditioner 7, FTC Cabinet/Power Conditioner 8, Chemical Cabinet
Q5 所属附机2套
辅机：1,Power Supply 2, Miscellaneous 3, Stage 4, Stage/Optics
除此外我公司还有大量Edwards单泵和组合泵
Edwards Pump：
Qdp40, Qdp40/Qmb250, Qdp40/Qmb500
Iqdp80, Iqdp80/qmb500 ， Iqdp80/Iqmb250， Iqdp80/Iqmb500
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